Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices

Thermal scanning probe lithography enables fast fabrication of micro/nano structures with 100nm resolution, enhancing electronic performance through gold coating and resistivity characterization.

File Type: www
Categories: Scientific Paper
Tags: NanoFrazor, Thermal Scanning Probe (t-SPL)
Author: 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
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