Polypropylene carbonate enables high-resolution t-SPL nanopatterning via controlled thermal decomposition, achieving 50 nm lateral, sub-nanometer vertical resolution and grayscale pattern transfer for photonic and nanoelectronic fabrication.

File Type: www
Categories: Scientific Paper
Tags: NanoFrazor, Thermal Scanning Probe (t-SPL)
Author: Microsystems & Nanoengineering (nature)
Scroll to Top