A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching

This paper investigates Frequency Enhanced Electrochemical Pressure Solution (FEEPS) as a novel nanolithography method for etching silica surfaces with an AFM tip.
File Type: 202201297
Categories: Scientific Paper
Tags: NanoFrazor, Thermal Scanning Probe (t-SPL)
Author: Advanced Materials Technologies

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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the completeness and correctness of the translations.

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