Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist.
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, CMOS-compatible.
We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration.
Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm
A flat lens, designed through inverse design with a phase-only pupil function, achieves achromatic focusing over a broad spectrum in a single diffractive surface.
Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography.
Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances.
Discover our two Application Notes covering this topic: “Bilayer Lift-Off for NanoFrazor® Lithography”“Ultra-High Resolution Pattern Transfer on NanoFrazor® Lithography” In
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
In what is already a tradition ahead of the MNE International Conference on Micro and Nano Engineering, Heidelberg Instruments and
Press Release “LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments” by LUMINEQ dtd. Sept. 11, 2023
September 1, 2023, Espoo, Finland – Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment