DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography
November 1, 2021
The most advanced industrial grayscale lithography tool on the market.
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DWL
Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process
October 14, 2017
Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication.
Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology
October 14, 2017
First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices.
MPO 100 successfully installed at Kyoto University
April 9, 2024
Exciting news! At Kyoto University Nanotechnology Hub one MPO 100 3D microprinting system and one MLA 150 maskless lithography system
Thermal Probe Workshop 2024 – Thank You for a Successful Event
March 20, 2024
A look back on the 8th Thermal Probe Workshop We were delighted to host a community of nanotechnology experts, fabrication
Combining one- and multiphoton direct laser writing
February 26, 2024
Achieve high throughput and resolution. Despite its unique capacity for three-dimensional fabrication with minimal feature sizes below 100 nm, achieving
Effective Pattern Transfer after NanoFrazor Lithography
February 5, 2024
Discover our two Application Notes covering this topic: “Bilayer Lift-Off for NanoFrazor Lithography”“Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography” In
2.5D Topographies – 2 Cutting-Edge Solutions!
January 31, 2024
Advancing Excellence in Microfabrication: Fabrication of 2.5D Topographies with Maskless Grayscale Lithography or Two-Photon Polymerization (TPP) What looks like ocean
New Year’s greetings from CEO Konrad Roessler
January 25, 2024
2024 will mark Heidelberg Instruments‘ 40th anniversary. With gratitude we look back, with joy we look forward to what’s ahead.
Seasons’ Greeting from Heidelberg Instruments
December 21, 2023
Season’s Greetings from Heidelberg Instruments! In the spirit of joy and gratitude, we extend our warmest wishes to our valued
3D Printed Drug Delivery Devices
December 19, 2023
Microneedles as alternative to conventional drug administration Commonly used methods of drug delivery are associated with certain drawbacks: As an
SEMICON Europa 2023 at a glance
November 20, 2023
The Heidelberg Instruments booth at SEMICON EUROPA 2023 in Munich from November 14th -17th attracted a wide range of visitors
Winners of Application Image Competition receive certificates
October 16, 2023
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is