DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography
November 1, 2021
The most advanced industrial grayscale lithography tool on the market.
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DWL
Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process
October 14, 2017
Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication.
Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology
October 14, 2017
First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices.
Heidelberg Instruments Launches New Modular and 10x Faster NanoFrazor Nanolithography Tool
October 8, 2024
Zurich, Switzerland/Heidelberg, Germany — Heidelberg Instruments proudly announces the launch of its new NanoFrazor nanolithography system, advancing decades of expertise
Heidelberg Instruments Reports Several Installations of its ULTRA Semiconductor Mask Writer as Global Semiconductor Demand Surges
September 13, 2024
Heidelberg, Germany — Heidelberg Instruments, a world-leading provider of advanced laser lithography systems, is pleased to announce a continued stream
1024 Shades of Gray: Highest Precision in Microfabrication
August 22, 2024
In the world of microfabrication, precision and flexibility are the cornerstones of innovation. Imagine the possibilities when you can access
The Invisible Guardians: Unveiling the Secrets of High-Security Printing
August 12, 2024
In today’s world, protecting sensitive information and safeguarding valuable assets is paramount. From government documents and passports to banknotes and
The Power of Maskless Lithography for Microfabrication
July 1, 2024
For decades, photolithography with mask aligners has been the cornerstone of microfabrication. But what if there was a faster, more
Review Technical Workshop 2024 in Taiwan
June 26, 2024
Organized by our local distributor Stella Technology, the Technical Workshop 2024 for Heidelberg Instruments’ Direct Writing was held on June
Advancing Innovation in Micro- and Nanofabrication: Recap of Technical Workshop at The University of Tokyo
June 25, 2024
Heidelberg Instruments’ Workshop on Maskless Lithography and Direct Write technology in Japan, hosted at The University of Tokyo’s Takeda Building.
Maskless Lithography Highlighted at Kyoto University
June 24, 2024
Review Technical Workshop on June 11th, 2024 We were thrilled to have Kyoto University host one of our recent technical
A new DWL 66+ is Michigan bound!
June 17, 2024
The Lurie Nanofabrication Facility (LNF) ordered a Heidelberg Instruments DWL 66+ Maskless Laser Lithography System with CHIPS Act funding through
Congrats to the winners! – Application Image Competition 2023/2024
June 11, 2024
We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in