VPG 300 DI Maskless Stepper
Maskless direct imager for high-accuracy and high-resolution microstructures.
Maskless direct imager for high-accuracy and high-resolution microstructures.
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.
A production tool for standard photomasks and microstructures in i-line resists.
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
Photomask production on large substrates, perfect for display applications.
A tool specifically designed to produce mature semiconductor photomasks.
Versatile system for research and prototyping with variable resolution and wide selection of options.
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules.
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
The Heidelberg Instruments booth at SEMICON EUROPA 2023 in Munich from November 14th -17th attracted a wide range of visitors
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
In what is already a tradition ahead of the MNE International Conference on Micro and Nano Engineering, Heidelberg Instruments and
September 1, 2023, Espoo, Finland – Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in
Get a sneak peek into current material related research and further prospects. Our webinars on our NanoFrazor® Technology cover a
Heidelberg, Germany – Heidelberg Instruments, a global player in direct write technology and solution provider for the advanced packaging market,
Successful 7th Edition of the Thermal Probe Workshop hosted by Heidelberg Instruments Nano After a break of more than three
IFoV writing mode for stitching-free micro-optics Superior quality of optical components without stitching defects can be achieved with Infinite Field-of-View