VPG 300 DI Maskless Stepper
September 5, 2023
Maskless direct imager for high-accuracy and high-resolution microstructures.
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MPO 100 3D Lithography Tool
August 31, 2023
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.
VPG+ 200 / VPG+ 400 Volume Pattern Generator
June 26, 2023
A production tool for standard photomasks and microstructures in i-line resists.
MLA 300 Industrial Maskless Aligner
October 26, 2022
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
µMLA Tabletop Maskless Aligner
October 26, 2022
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
VPG+ 800 / VPG+ 1400 Volume Pattern Generator
June 26, 2022
Photomask production on large substrates, perfect for display applications.
ULTRA Semiconductor Mask Writer
April 26, 2022
A tool specifically designed to produce mature semiconductor photomasks.
DWL 66+ Ultimate Lithography System
April 1, 2022
Versatile system for research and prototyping with variable resolution and wide selection of options.
NanoFrazor® Explore Nanofabrication Tool
March 26, 2022
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules.
NanoFrazor® Scholar Nanofabrication Tool
March 26, 2022
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
SEMICON Europa 2023 at a glance
November 20, 2023
The Heidelberg Instruments booth at SEMICON EUROPA 2023 in Munich from November 14th -17th attracted a wide range of visitors
Winners of Application Image Competition receive certificates
October 16, 2023
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
Review Expert Workshop on Advanced Micro- and Nanofabrication 2023
October 9, 2023
In what is already a tradition ahead of the MNE International Conference on Micro and Nano Engineering, Heidelberg Instruments and
Press Release “LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments” by LUMINEQ dtd. Sept. 11, 2023
September 22, 2023
September 1, 2023, Espoo, Finland – Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment
EIPBN 2023 Conference Review
June 6, 2023
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
Congrats to the winners! – Application Image Competition 2022/2023
May 31, 2023
We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in
Discover the benefits of Thermal Scanning Probe Lithography with our NanoFrazor® Webinar
May 3, 2023
Get a sneak peek into current material related research and further prospects. Our webinars on our NanoFrazor® Technology cover a
Redefining Wafer-Level Packaging Production with Heidelberg Instruments Flexible Direct Writing Technology
April 19, 2023
Heidelberg, Germany – Heidelberg Instruments, a global player in direct write technology and solution provider for the advanced packaging market,
t-SPL community gathered for Thermal Probe Workshop
April 18, 2023
Successful 7th Edition of the Thermal Probe Workshop hosted by Heidelberg Instruments Nano After a break of more than three
Stitching-free micro-optics with MPO 100
January 26, 2023
IFoV writing mode for stitching-free micro-optics Superior quality of optical components without stitching defects can be achieved with Infinite Field-of-View