NanoFrazor
July 27, 2024
The NanoFrazor takes nanofabrication to the next level. Building on decades of research and development, the NanoFrazor brings thermal scanning probe lithography (t-SPL) into your
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µMLA Tabletop Maskless Aligner
April 1, 2024
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
MLA 300 Industrial Maskless Aligner
March 1, 2024
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
VPG 300 DI Maskless Stepper
September 5, 2023
Maskless direct imager for high-accuracy and high-resolution microstructures.
MPO 100 3D Lithography Tool
August 31, 2023
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.
VPG+ 200 / VPG+ 400 Volume Pattern Generator
June 26, 2023
A production tool for standard photomasks and microstructures in i-line resists.
VPG+ 800 / VPG+ 1400 Volume Pattern Generator
June 26, 2022
Photomask production on large substrates, perfect for display applications.
ULTRA Semiconductor Mask Writer
April 26, 2022
A tool specifically designed to produce mature semiconductor photomasks.
DWL 66+ Ultimate Lithography System
April 1, 2022
Versatile system for research and prototyping with variable resolution and wide selection of options.
NanoFrazor Explore Nanofabrication Tool
March 26, 2022
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules.
Heidelberg Instruments Reports Several Installations of its ULTRA Semiconductor Mask Writer as Global Semiconductor Demand Surges
September 13, 2024
Heidelberg, Germany — Heidelberg Instruments, a world-leading provider of advanced laser lithography systems, is pleased to announce a continued stream
1024 Shades of Gray: Highest Precision in Microfabrication
August 22, 2024
In the world of microfabrication, precision and flexibility are the cornerstones of innovation. Imagine the possibilities when you can access
The Invisible Guardians: Unveiling the Secrets of High-Security Printing
August 12, 2024
In today’s world, protecting sensitive information and safeguarding valuable assets is paramount. From government documents and passports to banknotes and
The Power of Maskless Lithography for Microfabrication
July 1, 2024
For decades, photolithography with mask aligners has been the cornerstone of microfabrication. But what if there was a faster, more
Review Technical Workshop 2024 in Taiwan
June 26, 2024
Organized by our local distributor Stella Technology, the Technical Workshop 2024 for Heidelberg Instruments’ Direct Writing was held on June
Advancing Innovation in Micro- and Nanofabrication: Recap of Technical Workshop at The University of Tokyo
June 25, 2024
Heidelberg Instruments’ Workshop on Maskless Lithography and Direct Write technology in Japan, hosted at The University of Tokyo’s Takeda Building.
Maskless Lithography Highlighted at Kyoto University
June 24, 2024
Review Technical Workshop on June 11th, 2024 We were thrilled to have Kyoto University host one of our recent technical
A new DWL 66+ is Michigan bound!
June 17, 2024
The Lurie Nanofabrication Facility (LNF) ordered a Heidelberg Instruments DWL 66+ Maskless Laser Lithography System with CHIPS Act funding through
Congrats to the winners! – Application Image Competition 2023/2024
June 11, 2024
We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in
Powering Semiconductor Manufacturing
June 3, 2024
Heidelberg Instruments tools, like our Volume Pattern Generator (VPG) series, the Laser Mask Writer ULTRA and the Maskless Aligner MLA