Large Scale Fresnel Zone Plates On SiN-Membranes
September 27, 2023
This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL 66+.
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Application Note
Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection
September 27, 2023
Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection.
Bilayer Lift-Off for NanoFrazor® Lithography
July 27, 2023
Explore bilayer lift-off with NanoFrazor® lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm.
Ultra-High Resolution Pattern Transfer on NanoFrazor® Lithography
July 27, 2023
High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor® lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed.
Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release
July 27, 2023
This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted.
Grayscale with GenISys 3D-PEC
March 26, 2023
We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography.
SEMICON Europa 2023 at a glance
November 20, 2023
The Heidelberg Instruments booth at SEMICON EUROPA 2023 in Munich from November 14th -17th attracted a wide range of visitors
Winners of Application Image Competition receive certificates
October 16, 2023
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
Review Expert Workshop on Advanced Micro- and Nanofabrication 2023
October 9, 2023
In what is already a tradition ahead of the MNE International Conference on Micro and Nano Engineering, Heidelberg Instruments and
Press Release “LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments” by LUMINEQ dtd. Sept. 11, 2023
September 22, 2023
September 1, 2023, Espoo, Finland – Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment
EIPBN 2023 Conference Review
June 6, 2023
The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is
Congrats to the winners! – Application Image Competition 2022/2023
May 31, 2023
We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in
Discover the benefits of Thermal Scanning Probe Lithography with our NanoFrazor® Webinar
May 3, 2023
Get a sneak peek into current material related research and further prospects. Our webinars on our NanoFrazor® Technology cover a
Redefining Wafer-Level Packaging Production with Heidelberg Instruments Flexible Direct Writing Technology
April 19, 2023
Heidelberg, Germany – Heidelberg Instruments, a global player in direct write technology and solution provider for the advanced packaging market,
t-SPL community gathered for Thermal Probe Workshop
April 18, 2023
Successful 7th Edition of the Thermal Probe Workshop hosted by Heidelberg Instruments Nano After a break of more than three
Stitching-free micro-optics with MPO 100
January 26, 2023
IFoV writing mode for stitching-free micro-optics Superior quality of optical components without stitching defects can be achieved with Infinite Field-of-View