Grayscale lithography with soft nanoimprinting enables low-cost, single-step fabrication of high-quality diffractive optics, expanding design freedom for lenses, holography, and advanced optical systems.
Greyscale lithography enables 2.5D microstructures for micro-optics. The authors examine deep patterning in mr-P 22G_XP resist using mask aligners, resist aging effects, and suitable photomask
Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist.
Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies.
In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE).
Heidelberg Instruments has received a substantial order from a top-tier photomask manufacturer in Asia for a VPG+ 1850 FPD system, developed on the established platform of its flagship VPG+ 1400 FPD Volume Pattern Generator.
As AI and HPC push monolithic circuits to obsolescence, the industry turns to Advanced Packaging. Yet, challenges like die shift and substrate warpage threaten to kill yield before the package leaves the fab. Enter the new hero of microelectronics: Maskless Lithography. Learn how adaptive alignment ensures your chiplets live to compute another day.
What a week! From September 15–18, we had the pleasure of joining the micro- and nanofabrication community at the 51st International Micro and Nano Engineering Conference (MNE 2025) in Southampton, UK.
Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world.
Heidelberg Instruments Korea celebrates 20 years of customer commitment and partnership! Built on trust, loyalty, and long-term relationships, Heidelberg Instruments Korea continues to play a vital role in bringing innovation to local customers.
Join Heidelberg Instruments in Southampton for MNE 2025! We are proud to be sponsor of the prestigious Fellow Award and are looking forward to celebrate the 10th anniversary of our MLA 150 with you.
Heidelberg Instruments has made significant performance upgrades to its renowned DWL 66⁺, solidifying its position as the ultimate research tool for microfabrication.
The DWL 66+ is now more powerful than ever, featuring two game-changing enhancements that redefine what’s possible with optical lithography.
Direct Laser Writing accelerates the fabrication of custom infrared metasurfaces—enabling fast, flexible, and cost-effective beam shaping, holography, and more, without complex lithography.
Physicists have crafted the “world’s smallest violin” as a stunning demonstration of their new NanoFrazor nanolithography capabilities.
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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the completeness and correctness of the translations.
