Grayscale Exposure Challenges Using Direct-Write Laser Exposure on Thick Positive Resist
August 18, 2025
Poster by Gerda Ekindorf about grayscale exposure challenges using direct-write laser exposure on thick positive resists.
Blog
micro resist technology
Heidelberg Instruments Reports Major Order for VPG+ 1850 FPD Volume Pattern Generator from Leading Asian Display Photomask Manufacturer
December 18, 2025
Heidelberg Instruments has received a substantial order from a top-tier photomask manufacturer in Asia for a VPG+ 1850 FPD system, developed on the established platform of its flagship VPG+ 1400 FPD Volume Pattern Generator.
The Die is Not Enough – How Maskless Lithography Enables the Next Generation in Advanced Packaging
December 5, 2025
As AI and HPC push monolithic circuits to obsolescence, the industry turns to Advanced Packaging. Yet, challenges like die shift and substrate warpage threaten to kill yield before the package leaves the fab. Enter the new hero of microelectronics: Maskless Lithography. Learn how adaptive alignment ensures your chiplets live to compute another day.
That’s a Wrap: Highlights from MNE 2025 in Southampton, UK
September 22, 2025
What a week! From September 15–18, we had the pleasure of joining the micro- and nanofabrication community at the 51st International Micro and Nano Engineering Conference (MNE 2025) in Southampton, UK.
A Decade of Discovery: Heidelberg Instruments’ MLA 150 Maskless Aligner Turns 10
September 16, 2025
Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world.
2005–2025: Celebrating 20 Years of Heidelberg Instruments Korea!
September 4, 2025
Heidelberg Instruments Korea celebrates 20 years of customer commitment and partnership! Built on trust, loyalty, and long-term relationships, Heidelberg Instruments Korea continues to play a vital role in bringing innovation to local customers.
Celebrating a Decade of Innovation: Join Heidelberg Instruments at MNE 2025
August 28, 2025
Join Heidelberg Instruments in Southampton for MNE 2025! We are proud to be sponsor of the prestigious Fellow Award and are looking forward to celebrate the 10th anniversary of our MLA 150 with you.
Heidelberg Instruments Enhances DWL 66⁺ Lithography System, Achieving Market-Leading 200 nm Resolution and 65,536 Grayscale Levels
July 15, 2025
Heidelberg Instruments has made significant performance upgrades to its renowned DWL 66⁺, solidifying its position as the ultimate research tool for microfabrication.
Closing the Gap to E-Beam: The DWL 66+ Now Delivers 200 nm Features and Unrivaled Grayscale
July 15, 2025
The DWL 66+ is now more powerful than ever, featuring two game-changing enhancements that redefine what’s possible with optical lithography.
Direct Laser Writing for Metasurfaces: Fast-Tracking the Future of Custom Infrared Optics
June 23, 2025
Direct Laser Writing accelerates the fabrication of custom infrared metasurfaces—enabling fast, flexible, and cost-effective beam shaping, holography, and more, without complex lithography.
Loughborough University Creates “World’s Smallest Violin” Showcasing NanoFrazor Capabilities
June 4, 2025
Physicists have crafted the “world’s smallest violin” as a stunning demonstration of their new NanoFrazor nanolithography capabilities.
