High-resolution lithography has played a central role in the nanotechnology revolution of the past decade. While ultra-high resolution lithography (<50 nm) is the focus of many research and industrial efforts, pattern transfer – the subsequent step to lithography – presents many challenges of its own. This application note shows how we can combine the capabilities

Thermal scanning probe lithography (t-SPL), enabled by NanoFrazor, uses a heatable ultrasharp tip for simultaneous patterning and inspection of nanostructures in thermal resists. Thanks to its non-invasive patterning principle, namely the lack of charged particles, the NanoFrazor technology allows for the fabrication of novel nanodevices with material systems and architectures that would otherwise not be

We’re happy to announce the first NanoFrazor Explore system in Latin America installed at UNICAMP, Campinas (Brazil) in the Center for Semiconductor Components (CCS). Samuel Bisig from Heidelberg Instruments Nano performed the installation and training with the help of our local distributers QD Latin America. This is the first of many more NanoFrazor systems to

NanoFrazor Scholar – a tabletop system for thermal scanning probe lithography – made a long journey from Zurich to the Westlake University in Hangzhou, China. Upon arrival at its destination – Dr Xiaorui Zheng’s lab of Advanced Lithography for Opto-Electronic Nanochips (ALIEN) – it was unpacked, assembled, installed and successfully tested within 24 hours. The check after unpacking