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CORE TECHNOLOGIES

Maskless Laser Lithography
Thermal Scanning Probe Lithography

Maskless Laser Lithography
Thermal Scanning Probe Lithography

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Accurate Pattern Placement
Grayscale Lithography
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Accurate Pattern Placement
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High Aspect Ratio
High & Ultra-High Resolution
In-situ Inspection & Metrology
Non-invasive Nanolithography
Small & Unconventional Substrates

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μMLA
MLA 150
DWL 66⁺
NanoFrazor
MLA 300
DWL 2000 GS / DWL 4000 GS
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VPG⁺ 1400 FPD
VPG 300 DI
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Application Image Competition on Advanced Micro- & Nanofabrication

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