Nanofluidics & Nanobiology

Nanofluidic Devices Enabled by Grayscale Nanolithography

  • Description

  • Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.

    The structures required for nanofluidics often feature constrictions, sloped floors and walls, and excellent shape control. The materials used in nanofluidics are not restricted to conventional semiconductor materials, but can rather extend to biocompatible polymers and epoxies. Therefore, patterning and pattern transfer possibilities in a range of polymers are beneficial.

    Using the grayscale patterning capabilities of the NanoFrazor®, nanofluidic systems can be created in an efficient and straightforward fashion. Thanks to the closed-loop lithography approach, the NanoFrazor® takes advantage of the integrated topography sensor to achieve very high accuracy in the write-depth. This unique capability enables the NanoFrazor® to achieve ultrahigh resolution in height, which is particularly advantageous for nano- and angstrofluidics applications.

  • Requirements

  • Ultra-high-resolution holes and channels

    Accurate grayscale lithography for channels, e.g., to guide particles

    Control of local variations in surface chemistry, e.g., for assembly of biomolecules

  • Solutions

  • Ultra-high resolution

    Used for patterning small holes, channels, or assembly traps

    Grayscale lithography

    Used for control of 2.5D topographies down to the single nanometer

    Nanoscale thermal conversion

    Used for the creation of local binding sites (e.g., amine groups)

    Easy operation

    In-situ inspection of nano-patterns, no vacuum or clean room required

Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.

The structures required for nanofluidics often feature constrictions, sloped floors and walls, and excellent shape control. The materials used in nanofluidics are not restricted to conventional semiconductor materials, but can rather extend to biocompatible polymers and epoxies. Therefore, patterning and pattern transfer possibilities in a range of polymers are beneficial.

Using the grayscale patterning capabilities of the NanoFrazor®, nanofluidic systems can be created in an efficient and straightforward fashion. Thanks to the closed-loop lithography approach, the NanoFrazor® takes advantage of the integrated topography sensor to achieve very high accuracy in the write-depth. This unique capability enables the NanoFrazor® to achieve ultrahigh resolution in height, which is particularly advantageous for nano- and angstrofluidics applications.

Ultra-high-resolution holes and channels

Accurate grayscale lithography for channels, e.g., to guide particles

Control of local variations in surface chemistry, e.g., for assembly of biomolecules

Ultra-high resolution

Used for patterning small holes, channels, or assembly traps

Grayscale lithography

Used for control of 2.5D topographies down to the single nanometer

Nanoscale thermal conversion

Used for the creation of local binding sites (e.g., amine groups)

Easy operation

In-situ inspection of nano-patterns, no vacuum or clean room required

Application images

suitable Systems

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