Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.

The structures required for nanofluidics often feature constrictions, sloped floors and walls, and excellent shape control. The materials used in nanofluidics are not restricted to conventional semiconductor materials, but can rather extend to biocompatible polymers and epoxies. Therefore, patterning and pattern transfer possibilities in a range of polymers are beneficial.

Using the grayscale patterning capabilities of the NanoFrazor®, nanofluidic systems can be created in an efficient and straightforward fashion. Thanks to the closed-loop lithography approach, the NanoFrazor® takes advantage of the integrated topography sensor to achieve very high accuracy in the write-depth. This unique capability enables the NanoFrazor® to achieve ultrahigh resolution in height, which is particularly advantageous for nano- and angstrofluidics applications.