Nanofluidics & Nanobiology

Nanofluidic Devices Enabled by Grayscale Nanolithography

Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range anywhere from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.

Ultra-high-resolution holes and channels used for single DNA molecules to pass through

Accurate 2.5D topography of channels used to guide particles in the liquid

Local variations of surface chemistry used to control the binding and assembly of biomolecules

Ultra-high resolution

Used for patterning small holes, channels, or assembly traps

Grayscale lithography

Used for control of 2.5D topographies down to the single nanometer

Nanoscale thermal conversion

Used for the creation of local binding sites (e.g., amine groups)

Easy operation

In-situ inspection of nano-patterns, no vacuum or clean room required

Application images

Systems

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