Nanofluidics & Nanobiology
Nanofluidic Devices Enabled by Grayscale Nanolithography
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Description
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Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.
The structures required for nanofluidics often feature constrictions, sloped floors and walls, and excellent shape control. The materials used in nanofluidics are not restricted to conventional semiconductor materials, but can rather extend to biocompatible polymers and epoxies. Therefore, patterning and pattern transfer possibilities in a range of polymers are beneficial.
Using the grayscale patterning capabilities of the NanoFrazor®, nanofluidic systems can be created in an efficient and straightforward fashion. Thanks to the closed-loop lithography approach, the NanoFrazor® takes advantage of the integrated topography sensor to achieve very high accuracy in the write-depth. This unique capability enables the NanoFrazor® to achieve ultrahigh resolution in height, which is particularly advantageous for nano- and angstrofluidics applications.
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Requirements
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Ultra-high-resolution holes and channels
Accurate grayscale lithography for channels e.g. to guide particles
Control of local variations in surface chemistry e.g. for assembly of biomolecules
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Benefits
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Ultra-high resolution
Used for patterning small holes, channels, or assembly trapsGrayscale lithography
Used for control of 2.5D topographies down to the single nanometerNanoscale thermal conversion
Used for the creation of local binding sites (e.g., amine groups)Easy operation
In-situ inspection of nano-patterns, no vacuum or clean room required
Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.
The structures required for nanofluidics often feature constrictions, sloped floors and walls, and excellent shape control. The materials used in nanofluidics are not restricted to conventional semiconductor materials, but can rather extend to biocompatible polymers and epoxies. Therefore, patterning and pattern transfer possibilities in a range of polymers are beneficial.
Using the grayscale patterning capabilities of the NanoFrazor®, nanofluidic systems can be created in an efficient and straightforward fashion. Thanks to the closed-loop lithography approach, the NanoFrazor® takes advantage of the integrated topography sensor to achieve very high accuracy in the write-depth. This unique capability enables the NanoFrazor® to achieve ultrahigh resolution in height, which is particularly advantageous for nano- and angstrofluidics applications.
Ultra-high-resolution holes and channels
Accurate grayscale lithography for channels e.g. to guide particles
Control of local variations in surface chemistry e.g. for assembly of biomolecules
Ultra-high resolution
Grayscale lithography
Nanoscale thermal conversion
Easy operation
Application images
suitable Systems
NanoFrazor® Explore
- Thermal Scanning Probe Lithography System
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.