Nanofluidics & Nanobiology

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Nanofluidic Devices Enabled by Grayscale Nanolithography

Handling very small volumes of liquids in nanofluidic channels is often required in nano- and biotechnology applications. These applications can range anywhere from DNA sequencing to sorting, assembling, and manipulating nanoparticles, proteins, enzymes, or viruses.

Ultra-high-resolution holes and channels used for single DNA molecules to pass through

Accurate 2.5D topography of channels used to guide particles in the liquid

Local variations of surface chemistry used to control the binding and assembly of biomolecules

Ultra-high resolution

Used for patterning small holes, channels, or assembly traps

Grayscale lithography

Used for control of 2.5D topographies down to the single nanometer

Nanoscale thermal conversion

Used for the creation of local binding sites (e.g., amine groups)

Easy operation

In-situ inspection of nano-patterns, no vacuum or clean room required

Application images

Tendon tissue
The nanostructure of a tendon tissue (left: AFM of the original tendon) patterned and imaged with NanoFrazor Explore into biocompatible PPA resist (right image). (Courtesy of Melbourne Nanofabrication Center, published in 2019)
Brownian motors-based nanoparticle sorting device
Nanofluidic ratchets fabricated with single-nanometer accuracy by NanoFrazor patterning. (Courtesy of IBM Research, Publications in Science and PRL 2018)
Ultra-high resolution enzyme assembly
Thermolysin enzymes trapped in 10-nm-wide lines written with a NanoFrazor Explore. (Courtesy of Riedo group at NYU, Publications in 2019)
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suitable Systems

NanoFrazor Scholar – the academic nanofabrication tool for nanopatterning of quantum devices, grayscale photonics and more

NanoFrazor® Scholar

  • Thermal Scanning Probe Lithography System

Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.

NanoFrazor Explore – Thermal Scanning Probe lithography with direct laser sublimation and grayscale patterning capability

NanoFrazor® Explore

  • Thermal Scanning Probe Lithography System

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.

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