Microfluidics

High aspect ratio lithography

  • Description

  • Microfluidics is a rapidly growing field that involves the manipulation of small volumes of fluids in channels with dimensions on the order of micrometers. It finds a wide range of applications in chemical and biological research, medical diagnostics, and even in industrial settings. One of the most significant applications of microfluidics is the development of lab-on-a-chip devices, which provide a miniaturized platform for performing chemical or biological reactions. The advantages of these devices include reduced sample and reagent volumes, faster reaction times, and enhanced sensitivity, making them useful in many fields, including drug discovery, point-of-care diagnostics, and environmental monitoring.

    Microfluidic devices can be designed with a wide range of features, including high aspect ratio structures, multi-layer channels, mixers, and filters. Common materials used for fabrication include SU-8 and mr-DWL resists, which can be patterned with the DWL and MLA series of Heidelberg Instruments’ direct-write lithography tools. For more complex 3D structures, the MPO 100 offers the possibility of using Two-Photon Polymerization of polymers. Nanofluidic structures, which require even higher resolution, can be fabricated using the ultra-high-resolution capabilities of the NanoFrazor®.

    Overall, microfluidics offers a powerful tool for researchers in many fields, enabling them to carry out experiments with greater control, efficiency, and sensitivity than ever before. With continued advances in technology, microfluidics is likely to continue to play an increasingly important role in fields ranging from basic research to medical diagnostics and beyond.

    Possible applications are shown below.

  • Requirements

  • Smooth surface

    Large structures in thick photoresist

    High aspect ratio structures

    Vertical sidewalls

  • Benefits

  • High resolution

    Pattern small-diameter holes and narrow channels

    Grayscale lithography

    Used to pattern either simple or complex 2.5D topographies (e.g. tapered channels)

    High aspect ratio

    Tall channels with vertical side walls

    No undercut

    The structure can be used for replication

Microfluidics is a rapidly growing field that involves the manipulation of small volumes of fluids in channels with dimensions on the order of micrometers. It finds a wide range of applications in chemical and biological research, medical diagnostics, and even in industrial settings. One of the most significant applications of microfluidics is the development of lab-on-a-chip devices, which provide a miniaturized platform for performing chemical or biological reactions. The advantages of these devices include reduced sample and reagent volumes, faster reaction times, and enhanced sensitivity, making them useful in many fields, including drug discovery, point-of-care diagnostics, and environmental monitoring.

Microfluidic devices can be designed with a wide range of features, including high aspect ratio structures, multi-layer channels, mixers, and filters. Common materials used for fabrication include SU-8 and mr-DWL resists, which can be patterned with the DWL and MLA series of Heidelberg Instruments’ direct-write lithography tools. For more complex 3D structures, the MPO 100 offers the possibility of using Two-Photon Polymerization of polymers. Nanofluidic structures, which require even higher resolution, can be fabricated using the ultra-high-resolution capabilities of the NanoFrazor®.

Overall, microfluidics offers a powerful tool for researchers in many fields, enabling them to carry out experiments with greater control, efficiency, and sensitivity than ever before. With continued advances in technology, microfluidics is likely to continue to play an increasingly important role in fields ranging from basic research to medical diagnostics and beyond.

Possible applications are shown below.

Smooth surface

Large structures in thick photoresist

High aspect ratio structures

Vertical sidewalls

High resolution

Pattern small-diameter holes and narrow channels

Grayscale lithography

Used to pattern either simple or complex 2.5D topographies (e.g. tapered channels)

High aspect ratio

Tall channels with vertical side walls

No undercut

The structure can be used for replication

Application images

suitable Systems

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