Microfluidics
High aspect ratio lithography
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Description
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Microfluidics is a rapidly growing field that involves the manipulation of small volumes of fluids in channels with dimensions on the order of micrometers. It finds a wide range of applications in chemical and biological research, medical diagnostics, and even in industrial settings. One of the most significant applications of microfluidics is the development of lab-on-a-chip devices, which provide a miniaturized platform for performing chemical or biological reactions. The advantages of these devices include reduced sample and reagent volumes, faster reaction times, and enhanced sensitivity, making them useful in many fields, including drug discovery, point-of-care diagnostics, and environmental monitoring.
Microfluidic devices can be designed with a wide range of features, including high aspect ratio structures, multi-layer channels, mixers, and filters. Common materials used for fabrication include SU-8 and mr-DWL resists, which can be patterned with the DWL and MLA series of Heidelberg Instruments’ direct-write lithography tools. For more complex 3D structures, the MPO 100 offers the possibility of using Two-Photon Polymerization of polymers. Nanofluidic structures, which require even higher resolution, can be fabricated using the ultra-high-resolution capabilities of the NanoFrazor®.
Overall, microfluidics offers a powerful tool for researchers in many fields, enabling them to carry out experiments with greater control, efficiency, and sensitivity than ever before. With continued advances in technology, microfluidics is likely to continue to play an increasingly important role in fields ranging from basic research to medical diagnostics and beyond.
Possible applications are shown below.
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Requirements
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Smooth surface
Large structures in thick photoresist
High aspect ratio structures
Vertical sidewalls
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Benefits
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High resolution
Pattern small-diameter holes and narrow channelsGrayscale lithography
Used to pattern either simple or complex 2.5D topographies (e.g. tapered channels)High aspect ratio
Tall channels with vertical side wallsNo undercut
The structure can be used for replication
Microfluidics is a rapidly growing field that involves the manipulation of small volumes of fluids in channels with dimensions on the order of micrometers. It finds a wide range of applications in chemical and biological research, medical diagnostics, and even in industrial settings. One of the most significant applications of microfluidics is the development of lab-on-a-chip devices, which provide a miniaturized platform for performing chemical or biological reactions. The advantages of these devices include reduced sample and reagent volumes, faster reaction times, and enhanced sensitivity, making them useful in many fields, including drug discovery, point-of-care diagnostics, and environmental monitoring.
Microfluidic devices can be designed with a wide range of features, including high aspect ratio structures, multi-layer channels, mixers, and filters. Common materials used for fabrication include SU-8 and mr-DWL resists, which can be patterned with the DWL and MLA series of Heidelberg Instruments’ direct-write lithography tools. For more complex 3D structures, the MPO 100 offers the possibility of using Two-Photon Polymerization of polymers. Nanofluidic structures, which require even higher resolution, can be fabricated using the ultra-high-resolution capabilities of the NanoFrazor®.
Overall, microfluidics offers a powerful tool for researchers in many fields, enabling them to carry out experiments with greater control, efficiency, and sensitivity than ever before. With continued advances in technology, microfluidics is likely to continue to play an increasingly important role in fields ranging from basic research to medical diagnostics and beyond.
Possible applications are shown below.
Smooth surface
Large structures in thick photoresist
High aspect ratio structures
Vertical sidewalls
High resolution
Grayscale lithography
High aspect ratio
No undercut
Application images
suitable Systems
MLA 150
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
DWL 66+
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
DWL 2000 GS / DWL 4000 GS
- Direct Write Laser Lithography System
The most advanced industrial grayscale lithography tool on the market.
MPO 100
- Two-Photon Polymerization Multi-User Tool
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.