Micro-optics

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Reflectors, Diffusors and Microlenses Crafted in Excellence

  • Description

  • Micro-lens arrays and complex Fresnel lenses are crucial components in compact camera optics due to the increasing demand for advanced and miniaturized optics in smartphones and tablets. These micro-lenses are used in a variety of applications such as wave-front sensors, fiber coupling, or homogenizing light sources. The production of these micro-lenses begins with grayscale lithography to generate a mold, which can then be replicated via LIGA to create a metal shim, used as a master tool for molding, imprinting, or hot embossing. Grayscale lithography is also used to fabricate micro-prisms, waveguides, blazed gratings, CGH (Computer Generated Holograms) and specialty security labels, among others. Direct Write Lithography enables the precise manufacturing of VLS (Variable Line Spacing) and standard gratings. The DWL series includes various high-performance Grayscale lithography systems, such as DWL 66+ for R&D and the DWL 2000 GS/ DWL 4000 GS for high-end requirements.

    The MPO 100 utilizes Two-Photon Polymerization (TPP) to generate refractive and diffractive micro-optical elements with arbitrary shapes, providing unlimited design freedom compared to conventional techniques. This allows for the creation of miniaturized devices with multiple functions. With the MPO 100, individual micro-lenses or arrays can be fabricated directly on photonic chips, substrates, or optical fibers for endoscopic devices for in- and outcoupling purposes. Additionally, replication masters can be manufactured, providing mass production capabilities of sophisticated optical designs.

    The NanoFrazor® systems are powerful tools that can be used for a variety of micro-and nano-optic applications. Their high resolution associated with their grayscale lithography capabilities make them ideal for fabricating nano-optical structures such as diffraction gratings, optical Fourier surfaces, phase plates and more intricate finely tuned optical components.

  • Requirements

  • Very precise shape control

    Excellent surface roughness

    High throughput

    No stitching artefacts

    High resolution

    Flexible substrate material and sizes for different applications

    Diffraction gratings: Strict requirements for surface quality, groove position, and groove profile

  • Solutions

  • High and ultra-high resolution

    300 nm (DWL66+), 100 nm (MPO 100) 15 nm (NanoFrazor®)

    Stitching reduction functions

    Allowing smooth surfaces of large micro-optical elements in thick photoresist

    Substrates from small pieces to G8 panel sizes

    Our systems offer the possibility to choose the right stage size for your application

    Shape optimization

    Used to simplify the compensation of the nonlinear effects

    High precision stage system for accurate pattern placement

    Used to perfectly position micro-optic devices

    Application specific write mode to optimize resolution and throughput

    The choice of write modes enables to make the right compromise for your application (DWL series)

Micro-lens arrays and complex Fresnel lenses are crucial components in compact camera optics due to the increasing demand for advanced and miniaturized optics in smartphones and tablets. These micro-lenses are used in a variety of applications such as wave-front sensors, fiber coupling, or homogenizing light sources. The production of these micro-lenses begins with grayscale lithography to generate a mold, which can then be replicated via LIGA to create a metal shim, used as a master tool for molding, imprinting, or hot embossing. Grayscale lithography is also used to fabricate micro-prisms, waveguides, blazed gratings, CGH (Computer Generated Holograms) and specialty security labels, among others. Direct Write Lithography enables the precise manufacturing of VLS (Variable Line Spacing) and standard gratings. The DWL series includes various high-performance Grayscale lithography systems, such as DWL 66+ for R&D and the DWL 2000 GS/ DWL 4000 GS for high-end requirements.

The MPO 100 utilizes Two-Photon Polymerization (TPP) to generate refractive and diffractive micro-optical elements with arbitrary shapes, providing unlimited design freedom compared to conventional techniques. This allows for the creation of miniaturized devices with multiple functions. With the MPO 100, individual micro-lenses or arrays can be fabricated directly on photonic chips, substrates, or optical fibers for endoscopic devices for in- and outcoupling purposes. Additionally, replication masters can be manufactured, providing mass production capabilities of sophisticated optical designs.

The NanoFrazor® systems are powerful tools that can be used for a variety of micro-and nano-optic applications. Their high resolution associated with their grayscale lithography capabilities make them ideal for fabricating nano-optical structures such as diffraction gratings, optical Fourier surfaces, phase plates and more intricate finely tuned optical components.

Very precise shape control

Excellent surface roughness

High throughput

No stitching artefacts

High resolution

Flexible substrate material and sizes for different applications

Diffraction gratings: Strict requirements for surface quality, groove position, and groove profile

High and ultra-high resolution

300 nm (DWL66+), 100 nm (MPO 100) 15 nm (NanoFrazor®)

Stitching reduction functions

Allowing smooth surfaces of large micro-optical elements in thick photoresist

Substrates from small pieces to G8 panel sizes

Our systems offer the possibility to choose the right stage size for your application

Shape optimization

Used to simplify the compensation of the nonlinear effects

High precision stage system for accurate pattern placement

Used to perfectly position micro-optic devices

Application specific write mode to optimize resolution and throughput

The choice of write modes enables to make the right compromise for your application (DWL series)

Application images

Irregular Microlens Array - Concave - Pseudo-square arrangement of lenslet. ~18µm (Average side) and ~6µm depth in AZ4562.
Irregular Microlens Array - Concave - Pseudo-square arrangement of lenslet. ~18µm (Average side) and ~6µm depth in AZ4562.
A fresnel lenses is a volume- and mass-reduced type of micro-optic
DWL 66+: Micrograph showing the image of a Fresnel lens (diameter 506 µm, height 10 µm).
A Fresnel lens (type of micro-optic) with a number concentric rings.
DWL 66+: This compact lens design consists of a number of concentric rings. Originally invented to reduce mass and volume of lenses used in lighthouses, it is now a crucial component in today's micro-optics and optoelectronics, for example in miniature cameras such as we find on our mobile phones.
Diffractive optical elements are commonly used for light modulation.
DWL 66+: Multi-level Diffractive Optical Elements (DOEs) are valuable devices commonly used for light modulation. By changing the phase profile of a laser beam, DOEs can split and shape the beam in well-defined ways, enabling the efficient generation of beam arrays or complex light patterns.
Confocal microscope image of a convex fresnel lens.
DWL 66+: Confocal microscope image of a convex fresnel lens (diameter 506 µm, height 10 µm).
Confocal microscope image of a micro lens array in a honeycomb arrangement.
DWL 66+: Confocal microscope image of a micro lens array in a honeycomb arrangement (hexagon radius 10 µm, height 2.7 µm).
DWL 66+: Confocal microscope image of a pyramid (pitch 47 µm, height 5.8 µm).
DWL 66+: Confocal microscope image of a pyramid (pitch 47 µm, height 5.8 µm).
Confocal microscope image of the central part of a concave fresnel lens.
DWL 66+: Confocal microscope image of the central part of a concave fresnel lens (diameter of the central part: 120 µm, height 11 µm).
Tailored diffusers and reflectors have applications for example in light sources and illumination.
Tailored diffusers and reflectors have applications for example in light sources and illumination, for example backlight units in LCD displays. This example shows a retro-reflector structure. (Courtesy of karmic.ch)
Microlenses and microlens arrays are key components in modern-day micro-optics.
Microlenses and microlens arrays are key components in modern-day micro-optics. They are used in wavefront sensors, for fiber coupling, or for homogenizing light sources.
Microlenses written in 15 micrometer thick photoresist.
Microlenses written in 15 μm thick AZ4562, with a pitch of 30 μm and a radius of curvature of 16 μm.
A compound structure with a surface texture done by grayscale lithography
This example shows a compound structure – a complex structure made of micro- and nanostructures. The insect eye, for instance (in particular the moth- or fly-eye), consists of a series of compound structures. (Courtesy of ShenZhen Nahum-Eli Optical Technology Inc.)
Lens stacks for applications in endoscopy (Life Sciences/Biomedical Engineering). Novel designs can be fabricated in a single process step without the need for alignment and assembly. Fabricated with MPO 100.
Lens stacks for applications in endoscopy (Life Sciences/Biomedical Engineering). Novel designs can be fabricated in a single process step without the need for alignment and assembly. Fabricated with MPO 100.
Metalens with feature sizes down to 100 nm, fabricated with MPO 100 predecessor LithoProf3D. (Courtesy of PHENOmenon, EU-funded project, GA 780278)
Metalens with feature sizes down to 100 nm, fabricated with MPO 100 predecessor LithoProf3D. (Courtesy of PHENOmenon, EU-funded project, GA 780278)
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suitable Systems

DWL 66+

  • Direct Write Laser Lithography System

Our most versatile system for research and prototyping with variable resolution and wide selection of options.

DWL 2000 GS and DWL 4000 GS industrial-level grayscale lithography for masks and wafers for IC, MEMS, micro-optic, and more

DWL 2000 GS / DWL 4000 GS

  • Direct Write Laser Lithography System

The most advanced industrial grayscale lithography tool on the market.

MPO 100 – a TPP tool for 3D Lithography and 3D Microprinting for optics, photonics, mechanics, and biomedical engineering

MPO 100

  • Two-Photon Polymerization Multi-User Tool

Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.

NanoFrazor Explore – Thermal Scanning Probe lithography with direct laser sublimation and grayscale patterning capability

NanoFrazor® Explore

  • Thermal Scanning Probe Lithography System

Thermal scanning probe lithography tool with direct laser sublimation and grayscale modules. Excellent alternative to e-beam lithography tools.

NanoFrazor Scholar – the academic nanofabrication tool for nanopatterning of quantum devices, grayscale photonics and more

NanoFrazor® Scholar

  • Thermal Scanning Probe Lithography System

Table-top thermal scanning probe lithography system with in-situ AFM imaging. Compact and compatible with glovebox.

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