MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
Find out more
VPG 300 DI Maskless Stepper
The VPG 300 DI Maskless Stepper is a Volume Pattern Generator specifically designed for direct writing of high-accuracy and high-resolution microstructures in i-line resists. Derived from the mask making tool, the VPG 300 DI offers all advanced VPG+ system features for use in academic and industrial R&D, or low-volume production.
Learn more
Advanced Packaging
Redefining Wafer-Level Packaging Production with Heidelberg  Instruments flexible Direct Writing technology.

Flexible designs, high throughput, uniformity, and yield are the basic requirements in the semiconductor industry. The MLA 300 Maskless Aligner meets all of these requirements.
Discover this application
Application Image Competition 2023/2024
on Advanced Nano- and Microfabrication
Heidelberg Instruments renews the invitation to all users of their systems to take part in the next edition of this competition.
More info
The winners
Application Image Competition 2022/2023
on Advanced Nano- and Microfabrication

Congratulations to the winners!
We have received outstanding contributions to the first edition of this competition. And now, the winners have been selected! Find out who won by clicking the button below.
Click here
MPO 100
3D Lithography and 3D Microprinting

1 – 10 – 100 – 1000.
The MPO 100 is a Two-Photon Polymerization (TPP) Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in optics, photonics, mechanics, and biomedical engineering.
Discover more
NanoFrazor® Explore
Revolutionizing Nanofabrication: the first hybrid system to write anything from 15 nm to 100 μm.
Find out more

Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the design, development, and manufacture of high-precision laser lithography systems, maskless aligners, and nanofabrication tools.

With over 35 years of experience and well over 1,300 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland, and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment. 

Industry stakeholders, as well as working groups of the most renowned universities and research institutes all over the world, use Heidelberg Instruments’ systems for advanced micro- and nanopatterning. Fields of application are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D materials, IoT, and many more. 

Applications | Technologies | Key Features


Blog & News

The EIPBN conference, which stands for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, and is also known as “3-Beams”, annually attracts scientists and engineers dedicated

We are thrilled to announce the results of our recent image competition, which showcased the capabilities of our tools in advanced research. The competition drew in an impressive array of

Get a sneak peek into current material related research and further prospects. Our webinars on our NanoFrazor® Technology cover a variety of topics around its operational capabilities and range of

Would you like to know more about our system portfolio, key features, our corresponding core technologies or possible applications?

Meet us at exhibitions and conferences year-round.

Dates | Events

No event found!


About us

From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.

Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools. 

Find out more

Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. 
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.

Find out more

Learn more about careers at Heidelberg Instruments.

Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. 

Find out more

Heidelberg Instruments started in Heidelberg, Germany and has expanded its reach with subsidiary offices to seven different countries, including the US and China, to serve our global customer base and interested parties.

Additionally, global partner offices represent our products, applications and technologies in other countries without subsidiary coverage.

Find out more

Scroll to Top